Image Signal within +/-10v used for NPGS Alignment feature.īlanker within +/-5v, <200 mA fast blankers, slow shutters, and systems with no blankers are all supported.Īutomated Stage interface programs for several common automated stages are available at no charge. In either case, the picoammeter is usually not directly connect to NPGS, although it can be through a optional interface. Typically, an external picoammeter is connected to the specimen current output from the microscope stage, or less often, a picoammeter will be built into the microscope. Picoammeter A picoammeter that can read the beam current hitting the sample is required for lithography. Analog XY Inputs +/-3v to +/-10v range typical, other ranges can be supported >5k ohms impedance typical, >2k ohm is supported.
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